Fast access to high quality data
• With excellent spatial resolution (lt; 10 1="" nm="" br=""> (0.1nm) CL data was collected
• Collect CL data with both Angle and wavelength resolution
• Collect hyperspectral data up to 30 times faster than previous generation technologies
Easy to operate
• Optimized results are achieved through fully automated optical path alignment and prescription-driven operation
• Constantly aligned light paths provide repeatable results for both short and long term work
• Big vision improves data acquisition throughput and simplifies user workflow
Precise correlation with other signals
• Simultaneous detection of multiple signals to correlate physical property or component information with CL data
• No compromises needed -- Make full use of the SEM In-Lens probe while conducting CL measurements